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It uses a special focusing geometry, allowing for the measurement of very low intensity X-ray radiation.
• Achieves very high detection efficiency through special focusing geometry • Absolute intensity calibration can be performed upon request • Compact • The crystal part is not movable • No need to replace the crystal • Spectrum range can be optimized for EUV λ = 6 to 7 nm or 12 to 14 nm
Detecting characteristic X-rays! An effective analytical method for obtaining elemental information in micro-regions and micro-foreign substances.
"Energy Dispersive X-ray Spectroscopy (EDS or EDX)" is a method for obtaining elemental information about samples or foreign substances by detecting characteristic X-rays generated by electron beam irradiation using a detector attached to an electron microscope (SEM or TEM). When characteristic X-rays generated by irradiating a material with an electron beam enter the detector, a number of electron-hole pairs equivalent to the energy of the characteristic X-rays are produced. By measuring this number (current), it is possible to determine the energy of the characteristic X-rays, and since the energy varies by element, it is possible to investigate the elemental information of the material. 【Analysis by EDS (Partial)】 ■ Qualitative analysis of intermetallic compounds (point analysis) - By examining which element's characteristic X-ray energy corresponds to the characteristic X-rays in the measured spectrum, it is possible to determine the type of elements. ■ Semi-quantitative analysis of intermetallic compounds - By examining the intensity (count number) of each characteristic X-ray, it is possible to calculate the concentration of the contained elements. *For more details, please refer to the PDF document or feel free to contact us.
